11 February 2010 Fabrication and optimization of Tantalum pentoxide waveguides for optical micro-propulsion
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Abstract
Design, fabrication and optimization of high refractive index (2.1 @ 1070 nm), sub-micron thickness (200 nm) Tantalum Pentoxide waveguides is reported. Optimization of fabrication parameters reduces the propagation loss to ~ 1 dB/cm @ 1070 nm for Ta2O5 waveguides. Ta2O5 waveguides were found to be stable for high power application with no significant absorption peaks over a large range of wavelengths (600-1700 nm). Ta2O5 waveguides provide high intensity in the evanescent field, which is useful for efficient optical propelling of micro-particles. We have employed Ta2O5 waveguide to propel polystyrene micro-particles with 50 μm/s velocity.
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Balpreet Singh Ahluwalia, Olav Gaute Hellesø, Ananth Z. Subramanian, Nicolas M. B. Perney, Neil P. Sessions, James S. Wilkinson, "Fabrication and optimization of Tantalum pentoxide waveguides for optical micro-propulsion", Proc. SPIE 7604, Integrated Optics: Devices, Materials, and Technologies XIV, 76040W (11 February 2010); doi: 10.1117/12.840393; https://doi.org/10.1117/12.840393
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