11 February 2010 Fabrication and optimization of Tantalum pentoxide waveguides for optical micro-propulsion
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Design, fabrication and optimization of high refractive index (2.1 @ 1070 nm), sub-micron thickness (200 nm) Tantalum Pentoxide waveguides is reported. Optimization of fabrication parameters reduces the propagation loss to ~ 1 dB/cm @ 1070 nm for Ta2O5 waveguides. Ta2O5 waveguides were found to be stable for high power application with no significant absorption peaks over a large range of wavelengths (600-1700 nm). Ta2O5 waveguides provide high intensity in the evanescent field, which is useful for efficient optical propelling of micro-particles. We have employed Ta2O5 waveguide to propel polystyrene micro-particles with 50 μm/s velocity.
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Balpreet Singh Ahluwalia, Balpreet Singh Ahluwalia, Olav Gaute Hellesø, Olav Gaute Hellesø, Ananth Z. Subramanian, Ananth Z. Subramanian, Nicolas M. B. Perney, Nicolas M. B. Perney, Neil P. Sessions, Neil P. Sessions, James S. Wilkinson, James S. Wilkinson, } "Fabrication and optimization of Tantalum pentoxide waveguides for optical micro-propulsion", Proc. SPIE 7604, Integrated Optics: Devices, Materials, and Technologies XIV, 76040W (11 February 2010); doi: 10.1117/12.840393; https://doi.org/10.1117/12.840393


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