16 February 2010 Arrays of SOI photonic wire biosensors for label-free molecular detection
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Proceedings Volume 7606, Silicon Photonics V; 76060C (2010) https://doi.org/10.1117/12.842027
Event: SPIE OPTO, 2010, San Francisco, California, United States
We present an SOI biosensor microarray chip that allows multiple molecular binding reactions to be simultaneously monitored. The individual biosensors are formed using 0.26 × 0.45 μm2 silicon photonic wire waveguides, which are arranged in compact Mach-Zehnder interferometer geometries with near temperature independent response. The sharp bend radius permitted by the photonic wires is exploited to form dense spiral waveguide structures that provide several millimeters of path length in a compact 130 μm diameter circular area. This design provides the high sensitivity of a long waveguide, while maintaining compatibility with commercial microarray spotting tools. For low volume analyte delivery the sensor array chip contains a monolithically integrated microfluidic channel formed in an SU-8 overlayer. Multiple antibody-antigen reactions are observed in real-time by using an infrared camera to monitor the optical powers emerging from the sensor array output waveguides.
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Adam Densmore, Adam Densmore, Dan-Xia Xu, Dan-Xia Xu, Martin Vachon, Martin Vachon, Siegfried Janz, Siegfried Janz, Rubin Ma, Rubin Ma, Yunhui Li, Yunhui Li, Gregory Lopinski, Gregory Lopinski, Christian C. Luebbert, Christian C. Luebbert, Qing Y. Liu, Qing Y. Liu, Jens H. Schmid, Jens H. Schmid, André Delâge, André Delâge, Pavel Cheben, Pavel Cheben, } "Arrays of SOI photonic wire biosensors for label-free molecular detection", Proc. SPIE 7606, Silicon Photonics V, 76060C (16 February 2010); doi: 10.1117/12.842027; https://doi.org/10.1117/12.842027

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