22 February 2010 A photonic biosensor system on a CMOS chip
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Proceedings Volume 7606, Silicon Photonics V; 76060D (2010) https://doi.org/10.1117/12.842960
Event: SPIE OPTO, 2010, San Francisco, California, United States
Abstract
Silicon photonic biosensors using SiNx/SiO2 waveguides fabricated in a commercial CMOS process are read out with an integrated polysilicon photodetector array buried under the waveguide. Increased surface refractive index, such as that generated by the specific binding of target molecules, locally decreases evanescent coupling to the detector array resulting in reduced photocurrent from elements under the higher index region. The operating principle of this local evanescent array coupled (LEAC) sensor differs from those of other waveguide sensors and has been explored using numerical simulations. Experimental studies have been performed using adsorbed bovine serum albumin (BSA) nanofilms as well as antigen-antibody pairs.
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Kevin L. Lear, Rongjin Yan, "A photonic biosensor system on a CMOS chip", Proc. SPIE 7606, Silicon Photonics V, 76060D (22 February 2010); doi: 10.1117/12.842960; https://doi.org/10.1117/12.842960
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