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16 February 2010 Semiconductor nanomembranes for stacked and flexible photonics
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Proceedings Volume 7606, Silicon Photonics V; 76060U (2010) https://doi.org/10.1117/12.841426
Event: SPIE OPTO, 2010, San Francisco, California, United States
Abstract
Crystalline semiconductor nanomembranes (NMs), which are transferable, stackable, bondable and manufacturable, offer unprecedented opportunities for unique and novel device applications. We report here nanophotonic devices based on stacked semiconductor NMs on Si, glass and flexible PET substrates. Photonic crystal Fano resonance-based surface-normal optical filters and broadband reflectors have been demonstrated with unique angle and polarization properties. Flexible photodetectors and solar cells have also been developed based on the NM stacking processes. Such NM stacking process can lead to a paradigm shift on silicon photonic integration and inorganic flexible photonics.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Weidong Zhou, Zhenqiang Ma, Hongjun Yang, Li Chen, Weiquan Yang, Zexuan Qiang, Guoxuan Qin, Huiqing Pang, Santhad Chuwongin, and Deyin Zhao "Semiconductor nanomembranes for stacked and flexible photonics", Proc. SPIE 7606, Silicon Photonics V, 76060U (16 February 2010); https://doi.org/10.1117/12.841426
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