16 February 2010 Mode properties of ALD filled slot waveguides
Author Affiliations +
Proceedings Volume 7606, Silicon Photonics V; 76061G (2010) https://doi.org/10.1117/12.842262
Event: SPIE OPTO, 2010, San Francisco, California, United States
We study filling slot waveguide structures with atomic layer deposition. We present our recent progress on the growth of slot waveguide structures with oxide materials and their nanocomposites. The effects of the slot geometry and the optical parameters of the filling material on the mode properties are theoretically studied.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Säynätjoki, A. Säynätjoki, T. Alasaarela, T. Alasaarela, A. Khanna, A. Khanna, A. Tervonen, A. Tervonen, S. Honkanen, S. Honkanen, "Mode properties of ALD filled slot waveguides", Proc. SPIE 7606, Silicon Photonics V, 76061G (16 February 2010); doi: 10.1117/12.842262; https://doi.org/10.1117/12.842262


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