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16 February 2010 Thermally tunable SOI CMOS photonics circuits
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Abstract
Ring waveguide resonating structures with high quality factors are the key components in the silicon photonics portfolio boosting up its functionality and circuit performance. Due to a number of manufacturing reasons their peak wavelengths are often prone to deviate from designed values. In order to keep the ring resonator operating as specified, its peak wavelength then needs to be corrected in a reliable and power efficient way. We demonstrate the performance of the thermally tunable mux/demux filter ring structures fabricated in the commercial 130 nm SOI CMOS line.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ivan Shubin, Xuezhe Zheng, Hiren Thacker, Jin Yao, Joannes Costa, Ying Luo, Guoliang Li, Ashok V. Krishnamoorthy, John E. Cunningham, Thierry Pinguet, and Attila Mekis "Thermally tunable SOI CMOS photonics circuits", Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 76070C (16 February 2010); https://doi.org/10.1117/12.842903
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