Optical bus waveguide metallic hard mold fabrication with opposite 45º micro-mirrors

Xinyuan Dou; Alan Xiaolong Wang; Xiaohui Lin; Haiyu Huang; Ray T. Chen

doi:10.1117/12.844486

23 February 2010 Optical bus waveguide metallic hard mold fabrication with opposite 45° micro-mirrors

Xinyuan Dou, Alan Xiaolong Wang, Xiaohui Lin, Haiyu Huang, Ray T. Chen

Proceedings Volume 7607, Optoelectronic Interconnects and Component Integration IX; 76070P (2010) https://doi.org/10.1117/12.844486
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

In this paper, 3-to-3 metallic hard mold for optical bus waveguide with opposite 45° micro-mirrors was successfully fabricated using electroplating method. The optical bus waveguide pre-mold with 45° surfaces before electroplating was prepared using photopolymer SU-8 through tilted exposure process under de-ionized water. Metal nickel was electroplated into SU-8 defined bus waveguide trenches. The 45° slant angles can be well controlled through titled exposure, which have deviations of 0.15° and 0.27° for SU-8 pre-mold and Ni hard mold, respectively. This metallic hard mold provides a convenient way to fabricate the polymeric optical bus waveguide devices through imprint technique.

Citation Download Citation

Xinyuan Dou, Alan Xiaolong Wang, Xiaohui Lin, Haiyu Huang, and Ray T. Chen "Optical bus waveguide metallic hard mold fabrication with opposite 45° micro-mirrors", Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 76070P (23 February 2010); https://doi.org/10.1117/12.844486

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