23 February 2010 Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method
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Abstract
In this paper, we presented fabrication of nickel based metal mold with 45° tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45° tilted angle, a 50μm thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5°. The polymeric waveguide array with 45° micromirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.
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Xiaolong Wang, Xiaolong Wang, Xinyuan Dou, Xinyuan Dou, Xiaohui Lin, Xiaohui Lin, Ray T. Chen, Ray T. Chen, } "Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method", Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 76070R (23 February 2010); doi: 10.1117/12.841173; https://doi.org/10.1117/12.841173
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