23 February 2010 Silicon-integrated photonic circuit for a single-stage large-angle beam steering optical phased array
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Abstract
In this paper, we present the results of the design and fabrication of a 12 channel nano-membrane-based optical phased array that allows for large angle beam steering operating at wavelength=1.55μm. Our device is fabricated on silicon-oninsulator using standard CMOS process. By implementing unequally spaced waveguide array elements, we can relax the half-wavelength spacing requirement for large angle beam steering, thereby avoiding the optical coupling between adjacent waveguides and reducing the side-lobe-level of the array radiation pattern. 1D beam steering of tranverseelectric polarized single mode light is designed to be achieved thermo-optically through the use of thin film metal phase shifters.
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David Kwong, David Kwong, YaZhao Liu, YaZhao Liu, Amir Hosseini, Amir Hosseini, Yang Zhang, Yang Zhang, Beomsuk Lee, Beomsuk Lee, Cheyun Lin, Cheyun Lin, Ray T. Chen, Ray T. Chen, } "Silicon-integrated photonic circuit for a single-stage large-angle beam steering optical phased array", Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 760713 (23 February 2010); doi: 10.1117/12.843833; https://doi.org/10.1117/12.843833
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