24 February 2010 Cascaded silicon-nitride integrated spectrometers for wideband high-resolution spectral interrogation
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Abstract
We report the demonstration of a cascaded configuration to realize wideband high-resolution spectrometers in silicon-nitride for the visible range. The cascaded configuration consists of an arrayed waveguide grating followed by a set of resonators and offers a flexibility to achieve the requirements of different sensing applications. We discuss some of the implementation issues of these structures. A preliminary demonstration shows the capability of such spectrometer devices to achieve ~0.1 nm wavelength resolution over 10 nm bandwidth in a compact device in a mm-scale device.
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Babak Momeni, Babak Momeni, Ehsan Shah Hosseini, Ehsan Shah Hosseini, Ali Adibi, Ali Adibi, } "Cascaded silicon-nitride integrated spectrometers for wideband high-resolution spectral interrogation", Proc. SPIE 7609, Photonic and Phononic Crystal Materials and Devices X, 76090L (24 February 2010); doi: 10.1117/12.848463; https://doi.org/10.1117/12.848463
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