5 February 2010 Non-mechanical beam steering of high speed VCSEL arrays
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A demonstration of non-mechanical beam steering of high speed VCSEL arrays is reported. 980 nm oxide-confined VCSELs were grown on a GaAs substrate with AlGaAs distributed Bragg reflectors (DBRs) and an InGaAs active region. Up to 24 separate VCSEL arrays can be independently switched to sweep the beam across the illumination area. Three array designs with varying total areas were fabricated with 97, 137, and 278 elements. The corresponding mesa diameters were 24, 14 and 10 μm with pitches of 52, 40 and 26 μm. The relative output power, speed, and thermal performance of an array design is reported.
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John R. Joseph, John R. Joseph, Rashid Safaisini, Rashid Safaisini, Gerard Dang, Gerard Dang, Kevin L. Lear, Kevin L. Lear, } "Non-mechanical beam steering of high speed VCSEL arrays", Proc. SPIE 7615, Vertical-Cavity Surface-Emitting Lasers XIV, 76150B (5 February 2010); doi: 10.1117/12.842735; https://doi.org/10.1117/12.842735


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