5 February 2010 Thermal resistance reduction in 670 nm vertical-cavity surface-emitting lasers
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Abstract
The first investigation of the effect of mesa plated sidewall heatsinks on the performance of red oxide-confined verticalcavity surface-emitting lasers (VCSELs) is reported. Single mode (SMSR>20dB) visible (670 nm) VCSELs were fabricated with an AlGaInP active region and AlGaAs distributed Bragg reflectors (DBRs). Copper is electroplated on and around VCSELs with different mesa diameters with a variety of overlap sizes. A trend of reduction in thermal impedance for some devices has also been observed with increasing the plating overlap size.
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Rashid Safaisini, Rashid Safaisini, Klein Johnson, Klein Johnson, Kevin L. Lear, Kevin L. Lear, "Thermal resistance reduction in 670 nm vertical-cavity surface-emitting lasers", Proc. SPIE 7615, Vertical-Cavity Surface-Emitting Lasers XIV, 76150L (5 February 2010); doi: 10.1117/12.842693; https://doi.org/10.1117/12.842693
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