Paper
5 February 2010 High-speed 980nm VCSELs with integrated distributed losses for mode control
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Abstract
Single fundamental mode, oxide-confined, polyimide planarized 980nm vertical cavity surface emitting lasers (VCSELs) with a multi-oxide layer (MOL) structure to increase oxide aperture diameter and maintain single-mode operation are fabricated and characterized. VCSELs with an 8μm active diameter and 16 mode suppression layers maintained single transverse mode operation under continuous wave (CW) condition with a side-mode suppression ratio (SMSR) of more than 32 dB at current densities up to 20 times threshold, which is five times higher than the previously reported value for similar devices with only 3 mode suppression layers, and exhibited a maximum 3-dB modulation frequency bandwidth of 13GHz. The threshold current and voltage were as low as 260μA and 1.45V, respectively, with a maximum optical power and slope efficiency of 1mW and 0.31W/A, respectively.
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Ahmad N. Al-Omari, Kevin L. Lear, and Husam Hamad "High-speed 980nm VCSELs with integrated distributed losses for mode control", Proc. SPIE 7615, Vertical-Cavity Surface-Emitting Lasers XIV, 76150P (5 February 2010); https://doi.org/10.1117/12.840554
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KEYWORDS
Vertical cavity surface emitting lasers

Oxides

Modulation

Aluminum

Laser damage threshold

Oxidation

Resistance

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