12 February 2010 'No blue' LED solution for photolithography room illumination
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Proceedings Volume 7617, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIV; 76170Z (2010); doi: 10.1117/12.840903
Event: SPIE OPTO, 2010, San Francisco, California, United States
This paper explored the feasibility of using a LED-based bulb as the illumination light source for photolithography room. A no-blue LED was designed, and the prototype was fabricated. The spectral power distribution of both the LED bulb and the yellow fluorescent tube was measured. Based on that, colorimetric values were calculated and compared on terms of chromatic coordinates, correlated color temperature, color rendering index, and chromatic deviation. Gretagmacbeth color charts were used as a more visional way to compare the two light sources, which shows that our no-blue LED bulb has much better color rendering ability than the YFT. Furthermore, LED solution has design flexibility to improve it further. The prototype has been tested with photoresist SU8-2005. Even after 15 days of illumination, no effect was observed. So this LED-based solution was demonstrated to be a very promising light source for photolithography room illumination due to its better color rendering in addition to energy efficiency, long life time and design flexibility.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Haiyan Ou, Dennis Corell, Carsten Dam-Hansen, Paul-Michael Petersen, Dan Friis, "'No blue' LED solution for photolithography room illumination", Proc. SPIE 7617, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIV, 76170Z (12 February 2010); doi: 10.1117/12.840903; https://doi.org/10.1117/12.840903

Light emitting diodes

Optical lithography


Light sources

Photoresist materials


Optical spheres

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