12 February 2010 Plastic substrate technologies for flexible displays
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Proceedings Volume 7618, Emerging Liquid Crystal Technologies V; 76180Q (2010) https://doi.org/10.1117/12.840385
Event: SPIE OPTO, 2010, San Francisco, California, United States
A novel plastic substrate for flexible displays was developed. The substrate consisted of a polycarbonate (PC) base film coated with a gas barrier layer and a transparent conductive thin film. PC with ultra-low intrinsic birefringence and high temperature dimensional stability was developed for the base film. The retardation of the PC base film was less than 1 nm at a wavelength of 550 nm (film thickness, 120 μm). Even at 180 °C, the elastic modulus was 2 GPa, and thermal shrinkage was less than 0.01%. The surface roughness of the PC base film was less than 0.5 nm. A silicon oxide (SiOx) gas barrier layer was deposited on the PC base film by a DC magnetron reactive sputtering method. In addition, a unique organic-inorganic hybrid material is coated on the SiOx to further improve the gas-barrier performance. The water vapor transmission rate of the film was less than 0.05 g/m2/day at 40 °C and 100% relative humidity (RH), and the permeation of oxygen was less than 0.05 cc/m2•day•atm at 40 °C and 90% RH. Indium Zinc Oxide optimized for the plastic substrate was deposited on the other side of the SiOx film by the DC magnetron sputtering method. The transmittance was 87% and the resistivity was 3.5×10-4 ohm•cm.
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Toru Hanada, Toru Hanada, Isao Shiroishi, Isao Shiroishi, Tuyoto Negishi, Tuyoto Negishi, Takashi Shiro, Takashi Shiro, "Plastic substrate technologies for flexible displays", Proc. SPIE 7618, Emerging Liquid Crystal Technologies V, 76180Q (12 February 2010); doi: 10.1117/12.840385; https://doi.org/10.1117/12.840385

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