18 February 2010 High quality assembly of liquid crystal on silicon (LCOS) devices for phase-only holography
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Proceedings Volume 7618, Emerging Liquid Crystal Technologies V; 761815 (2010) https://doi.org/10.1117/12.849359
Event: SPIE OPTO, 2010, San Francisco, California, United States
LCOS for phase-only holography is ideally made to better optical tolerance than that for conventional amplitude modulating applications. Die-level assembly is suited to custom devices and pre-production prototypes because of its flexibility and efficiency in conserving the silicon backplane. Combined with automated assembly, it will allow high reproducibility and fast turnaround time, making a way for pre-production testing and customer sampling before mass production. Optical testing is the key element in the process. By taking into account the flatness of both the backplane and the front glass plate, we have assembled LCOS devices. We have reached our aim of less than one quarter wavelength phase distortion across the active area.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Z. Zhang, Z. Zhang, A. M. Jeziorska-Chapman, A. M. Jeziorska-Chapman, N. Collings, N. Collings, M. Pivnenko, M. Pivnenko, J. Moore, J. Moore, W. I. Milne, W. I. Milne, W. A. Crossland, W. A. Crossland, D. P. Chu, D. P. Chu, } "High quality assembly of liquid crystal on silicon (LCOS) devices for phase-only holography", Proc. SPIE 7618, Emerging Liquid Crystal Technologies V, 761815 (18 February 2010); doi: 10.1117/12.849359; https://doi.org/10.1117/12.849359

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