Design and fabrication of multichannel tunable photodetector array

Xiaofeng Duan; Yongqing Huang; Xiaomin Ren; Hui Huang; Qi Wang; Song Wang; Yufeng Shang; Xian Ye; Shiwei Cai

doi:10.1117/12.851450

25 November 2009 Design and fabrication of multichannel tunable photodetector array

Xiaofeng Duan, Yongqing Huang, Xiaomin Ren, Hui Huang, Qi Wang, Song Wang, Yufeng Shang, Xian Ye, Shiwei Cai

Proceedings Volume 7631, Optoelectronic Materials and Devices IV; 763108 (2009) https://doi.org/10.1117/12.851450
Event: Asia Communications and Photonics, 2009, Shanghai, Shanghai , China

Abstract

A long wavelength multichannel tunable photodetector array was fabricated based on multistep Fabry-Pérot filter by using the heteroepitaxy growth of InP-In_0.53Ga_0.47As-InP PIN structure on a GaAs based GaAs/AlAs Fabry-Pérot filter structure. High quality heteroepitaxy was realized by employing a thin low temperature buffer layer. The array can detect multiple channels, and the tuning range of each detector is about 10nm. A spectral linewidth of 0.5nm, a quantum efficiency over 25%, and a 3dB bandwidth of 9.2GHz were simultaneously obtained.

Citation Download Citation

Xiaofeng Duan, Yongqing Huang, Xiaomin Ren, Hui Huang, Qi Wang, Song Wang, Yufeng Shang, Xian Ye, and Shiwei Cai "Design and fabrication of multichannel tunable photodetector array", Proc. SPIE 7631, Optoelectronic Materials and Devices IV, 763108 (25 November 2009); https://doi.org/10.1117/12.851450

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