Angular distribution of debris from CO[sub]2[/sub] and YAG laser-produced tin plasmas

D. Campos; R. W. Coons; M. D. Fields; M. Crank; S. S. Harilal; A. Hassanein

doi:10.1117/12.848333

20 March 2010 Angular distribution of debris from CO₂ and YAG laser-produced tin plasmas

D. Campos, R. W. Coons, M. D. Fields, M. Crank, S. S. Harilal, A. Hassanein

Proceedings Volume 7636, Extreme Ultraviolet (EUV) Lithography; 763612 (2010) https://doi.org/10.1117/12.848333
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

We investigated the angular dependence of atomic and ionic debris from CO₂ and YAG laser-produced tin plasmas. Several diagnostic techniques were employed for this study including a Faraday cup, witness plates and subsequent x-ray photoelectron spectroscopic analysis, optical emission spectroscopy etc. It was found that the debris emission from the Nd:YAG laser-produced plasmas fell sharply from the target normal. In contrast, the debris emission from the CO₂ laser-produced plasmas was almost constant at short angles from the target normal. Our results also indicated that the plasma produced by the CO₂ laser emitted less atomic and ionic debris compared to a plasma produced by Nd:YAG laser.

Citation Download Citation

D. Campos, R. W. Coons, M. D. Fields, M. Crank, S. S. Harilal, and A. Hassanein "Angular distribution of debris from CO₂ and YAG laser-produced tin plasmas", Proc. SPIE 7636, Extreme Ultraviolet (EUV) Lithography, 763612 (20 March 2010); https://doi.org/10.1117/12.848333

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