20 March 2010 Angular distribution of debris from CO2 and YAG laser-produced tin plasmas
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Abstract
We investigated the angular dependence of atomic and ionic debris from CO2 and YAG laser-produced tin plasmas. Several diagnostic techniques were employed for this study including a Faraday cup, witness plates and subsequent x-ray photoelectron spectroscopic analysis, optical emission spectroscopy etc. It was found that the debris emission from the Nd:YAG laser-produced plasmas fell sharply from the target normal. In contrast, the debris emission from the CO2 laser-produced plasmas was almost constant at short angles from the target normal. Our results also indicated that the plasma produced by the CO2 laser emitted less atomic and ionic debris compared to a plasma produced by Nd:YAG laser.
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D. Campos, R. W. Coons, M. D. Fields, M. Crank, S. S. Harilal, A. Hassanein, "Angular distribution of debris from CO2 and YAG laser-produced tin plasmas", Proc. SPIE 7636, Extreme Ultraviolet (EUV) Lithography, 763612 (20 March 2010); doi: 10.1117/12.848333; https://doi.org/10.1117/12.848333
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