High brightness EUV light source modeling

Sergey V. Zakharov; Peter Choi; Vasily S. Zakharov

doi:10.1117/12.848473

Abstract

EUV source for actinic mask metrology, particularly for defect inspection, requires extremely high brightness. The selfabsorption of radiation limits the in-band EUV radiance of the source plasma and the etendue constraint limits the usable power of a conventional single unit EUV source. Theoretical study and numerical modelling has been carried out to address fundamental issues in tin and xenon plasmas and to optimize the performance of EUV sources. The highly ionized xenon plasma in the presence of fast electrons demonstrates the enhanced radiance. Theoretical models and robust modelling tools are being further developed under an international collaboration project FIRE in the frame of the EU FP7 IAPP program. NANO-UV is delivering a new generation of EUV light source with an intrinsic photon collector. Extensive numerical modelling has provided basic numbers to select the optimal regimes for tin and xenon based source operation. From these designs, a family of specially configured multiplexed source structures is being introduced to address the mask metrology needs.

Citation Download Citation

Sergey V. Zakharov, Sergey V. Zakharov, Peter Choi, Peter Choi, Vasily S. Zakharov, Vasily S. Zakharov, } "High brightness EUV light source modeling", Proc. SPIE 7636, Extreme Ultraviolet (EUV) Lithography, 76363A (22 March 2010); doi: 10.1117/12.848473; https://doi.org/10.1117/12.848473

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