3 April 2010 Planarizing material for reverse-tone step and flash imprint lithography
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Proceedings Volume 7637, Alternative Lithographic Technologies II; 763708 (2010); doi: 10.1117/12.846430
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States
Abstract
Reverse-tone Step and Flash Imprint Lithography (S-FIL/R) requires materials that can be spin coated onto patterned substrates with significant topography and that are highly-planarizing. Ideally, these planarizing materials must contain silicon for etch selectivity, be UV or thermally curable, have low viscosity, and low volatility. One such novel material in particular, a branched and functionalized siloxane (Si-12), is able to adequately satisfy the above requirements. This paper describes a study of the properties of epoxy functionalized Si-12 (epoxy-Si-12) as a planarizing layer. An efficient synthetic route to epoxy-Si-12 was successfully developed, which is suitable and scalable for an industrial process. Epoxy-Si-12 has a high silicon content (30.0 %), low viscosity (29 cP @ 25 °C), and low vapor pressure (0.65 Torr @ 25 °C). A planarizing study was carried out using epoxy-Si-12 on trench patterned test substrates. The material showed excellent planarizing properties and met the calculated critical degree of planarization (critical DOP), which is a requirement for a successful etch process. An S-FIL/R process using epoxy-Si-12 was demonstrated using, an ImprioR 100 (Molecular Imprints Inc., USA) imprint tool. The results indicate that epoxy-Si-12 works very well as a planarizing layer for S-FIL/R.
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Tsuyoshi Ogawa, Satoshi Takei, B. Michael Jacobsson, Ryan Deschner, William Bell, Michael W. Lin, Yuji Hagiwara, Makoto Hanabata, C. Grant Willson, "Planarizing material for reverse-tone step and flash imprint lithography", Proc. SPIE 7637, Alternative Lithographic Technologies II, 763708 (3 April 2010); doi: 10.1117/12.846430; https://doi.org/10.1117/12.846430
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KEYWORDS
Silicon

Ultraviolet radiation

Etching

Oxygen

Silicon carbide

Lithography

Scanning electron microscopy

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