1 April 2010 Scatterometry simulator for multicore CPU
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In this paper, we show Scatterometry simulation software which has the spectroscopy calculation and optimization algorithm systems. We analyze the spectral Scatterometry using the wavelength range of 400nm to around 800nm. The calculation is sped up by parallel computing using a multicore CPU. Threading Building Blocks (TBB) techniques are used in the parallel computing. We calculate the spectroscopy using the rigorous coupled wave analysis (RCWA) which provides a method for calculating the diffraction of electromagnetic waves by periodic grating. A conjugate gradient (CG) method is used to automatically search the data which resembles the given spectrum. In this simulation, we can check the sensitivity for profile measurements. And we provide the results using this simulator.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hirokimi Shirasaki, Hirokimi Shirasaki, } "Scatterometry simulator for multicore CPU", Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76382V (1 April 2010); doi: 10.1117/12.848331; https://doi.org/10.1117/12.848331

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