New self-assembly strategies for next-generation lithography

Evan L. Schwartz; Joan K. Bosworth; Marvin Y. Paik; Christopher K. Ober

doi:10.1117/12.848409

25 March 2010 New self-assembly strategies for next generation lithography

Evan L. Schwartz, Joan K. Bosworth, Marvin Y. Paik, Christopher K. Ober

Proceedings Volume 7639, Advances in Resist Materials and Processing Technology XXVII; 76390G (2010) https://doi.org/10.1117/12.848409
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Future demands of the semiconductor industry call for robust patterning strategies for critical dimensions below twenty nanometers. The self assembly of block copolymers stands out as a promising, potentially lower cost alternative to other technologies such as e-beam or nanoimprint lithography. One approach is to use block copolymers that can be lithographically patterned by incorporating a negative-tone photoresist as the majority (matrix) phase of the block copolymer, paired with photoacid generator and a crosslinker moiety. In this system, poly(α-methylstyrene-block-hydroxystyrene)(PαMS-b-PHOST), the block copolymer is spin-coated as a thin film, processed to a desired microdomain orientation with long-range order, and then photopatterned. Therefore, selfassembly of the block copolymer only occurs in select areas due to the crosslinking of the matrix phase, and the minority phase polymer can be removed to produce a nanoporous template. Using bulk TEM analysis, we demonstrate how the critical dimension of this block copolymer is shown to scale with polymer molecular weight using a simple power law relation. Enthalpic interactions such as hydrogen bonding are used to blend inorganic additives in order to enhance the etch resistance of the PHOST block. We demonstrate how lithographically patternable block copolymers might fit in to future processing strategies to produce etch-resistant self-assembled features at length scales impossible with conventional lithography.

Citation Download Citation

Evan L. Schwartz, Joan K. Bosworth, Marvin Y. Paik, and Christopher K. Ober "New self-assembly strategies for next generation lithography", Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 76390G (25 March 2010); https://doi.org/10.1117/12.848409

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