Comparison of star and linear ArF resists

Drew C. Forman; Florian Wieberger; Andre Gröschel; Axel H. E. Müller; Hans-Werner Schmidt; Christopher K. Ober

doi:10.1117/12.848344

25 March 2010 Comparison of star and linear ArF resists

Drew C. Forman, Florian Wieberger, Andre Gröschel, Axel H. E. Müller, Hans-Werner Schmidt, Christopher K. Ober

Proceedings Volume 7639, Advances in Resist Materials and Processing Technology XXVII; 76390P (2010) https://doi.org/10.1117/12.848344
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Linear and star-shaped ArF photoresists were prepared and preliminary lithographic comparison was performed using electron-beam exposure. An oligo-initiator based on saccharose forms the core of the star shaped photoresist from which three standard ArF photoresist monomers, α-gamma butyrolactone methacrylate (GBLMA), methyl adamantyl methacrylate (MAMA) and hydroxyl adamantyl methacrylate (HAMA) were polymerized. Conditions were adjusted to obtain a low polydispersity, 6 kg/mol star polymer with a degree of polymerization of approximately five mers per arm. For comparison, a linear photoresist control was prepared using the same scheme. The star resist architecture was found to improve roughness without reducing sensitivity or resolution.

Citation Download Citation

Drew C. Forman, Florian Wieberger, Andre Gröschel, Axel H. E. Müller, Hans-Werner Schmidt, and Christopher K. Ober "Comparison of star and linear ArF resists", Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 76390P (25 March 2010); https://doi.org/10.1117/12.848344

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