30 March 2010 Study on acid diffusion length effect with PAG-blended system and anion-bounded polymer system
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Abstract
Fundamental studies on polymer bounded PAG and polymer - PAG blend type were carried out with the viewpoint of dissolution property, lithographic performance, and blur. These materials were prepared to be able to directly compare and to discuss the difference between blend and bounded PAG, with different PAG loading amount. Dissolution property revealed the clear difference of these materials tendency to the PAG loading amount variation. Lithographic performance difference corresponds to the dissolution property difference, and there found the strategy to improve lithographic performance with polymer bounded PAG type resist. Blur study suggests the advantage in polymer bounded PAG in resolution.
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Shinji Tarutani, Shinji Tarutani, Hideaki Tsubaki, Hideaki Tsubaki, Hidenori Takahashi, Hidenori Takahashi, Takayuki Itou, Takayuki Itou, Kentaro Matsunaga, Kentaro Matsunaga, Gousuke Shiraishi, Gousuke Shiraishi, Toshiro Itani, Toshiro Itani, "Study on acid diffusion length effect with PAG-blended system and anion-bounded polymer system", Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 76391O (30 March 2010); doi: 10.1117/12.846033; https://doi.org/10.1117/12.846033
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