10 March 2010 Novel fine-tuned model-based SRAF generation method using coherence map
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Abstract
We have developed the comprehensive sub-resolution assist features (SRAFs) generation method based upon the modulation of the coherence map. The method has broken through the trade-off relation between processing time and accuracy of the SRAF generation. We have applied this method to a real device layout and the average of Process Variation band width (PV band width) has improved to 40% without any processing time loss.
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Katsuyoshi Kodera, Katsuyoshi Kodera, Satoshi Tanaka, Satoshi Tanaka, Mikiyasu Yamaji, Mikiyasu Yamaji, Chikaaki Kodama, Chikaaki Kodama, Toshiya Kotani, Toshiya Kotani, Shigeki Nojima, Shigeki Nojima, Koji Hashimoto, Koji Hashimoto, Shoji Mimotogi, Shoji Mimotogi, Soichi Inoue, Soichi Inoue, } "Novel fine-tuned model-based SRAF generation method using coherence map", Proc. SPIE 7640, Optical Microlithography XXIII, 764017 (10 March 2010); doi: 10.1117/12.846322; https://doi.org/10.1117/12.846322
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