10 March 2010 Novel fine-tuned model-based SRAF generation method using coherence map
Author Affiliations +
We have developed the comprehensive sub-resolution assist features (SRAFs) generation method based upon the modulation of the coherence map. The method has broken through the trade-off relation between processing time and accuracy of the SRAF generation. We have applied this method to a real device layout and the average of Process Variation band width (PV band width) has improved to 40% without any processing time loss.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Katsuyoshi Kodera, Katsuyoshi Kodera, Satoshi Tanaka, Satoshi Tanaka, Mikiyasu Yamaji, Mikiyasu Yamaji, Chikaaki Kodama, Chikaaki Kodama, Toshiya Kotani, Toshiya Kotani, Shigeki Nojima, Shigeki Nojima, Koji Hashimoto, Koji Hashimoto, Shoji Mimotogi, Shoji Mimotogi, Soichi Inoue, Soichi Inoue, } "Novel fine-tuned model-based SRAF generation method using coherence map", Proc. SPIE 7640, Optical Microlithography XXIII, 764017 (10 March 2010); doi: 10.1117/12.846322; https://doi.org/10.1117/12.846322


Hybrid pattern matching based SRAF placement
Proceedings of SPIE (March 15 2016)
Cross-MEEF assisted SRAF print avoidance approach
Proceedings of SPIE (March 19 2018)
Model-based assist feature generation
Proceedings of SPIE (March 19 2007)
Source-mask co-optimization (SMO) using level set methods
Proceedings of SPIE (September 29 2009)

Back to Top