2 April 2010 Foundry verification of IP and incoming designs for manufacturing variability
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Abstract
With process technologies advancing to 65nm, 45nm, and below, device timing uncertainty due to lithography and other process variations has easily exceeded 50% and is still growing. In this paper, we present the development of a variability methodology, its correlation with silicon and application to cell and full-chip design verification and optimization. We describe both a methodology for variability analysis of standard cells and a full-chip screening methodology to identify potential chip variability excursions. This methodology relies on model-based analysis and integrates with our existing design-to-manufacturing flow. Based on silicon measurement data of one of our 65nm cell libraries, this methodology has achieved significant improvement in accuracy of estimating timing variations compared to a traditional rule-based method.
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Li-Fu Chang, Li-Fu Chang, Julia Fu, Julia Fu, Josh Yang, Josh Yang, Elain Zou, Elain Zou, Philippe Hurat, Philippe Hurat, Nishath Verghese, Nishath Verghese, Hua Ding, Hua Ding, } "Foundry verification of IP and incoming designs for manufacturing variability", Proc. SPIE 7641, Design for Manufacturability through Design-Process Integration IV, 76410F (2 April 2010); doi: 10.1117/12.848018; https://doi.org/10.1117/12.848018
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