Investigation of sodium-potassium niobate (Na0.5K0.5NbO3) thin film fabrication for piezoelectric sensor application

Sang-Dong Jang; Jung-Hyuk Koh; Joo-Hyung Kim; Jaehwan Kim

doi:10.1117/12.847490

30 March 2010 Investigation of sodium-potassium niobate (Na_0.5K_0.5NbO₃) thin film fabrication for piezoelectric sensor application

Sang-Dong Jang, Jung-Hyuk Koh, Joo-Hyung Kim, Jaehwan Kim

Author Affiliations +

Proceedings Volume 7646, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2010; 76460E (2010) https://doi.org/10.1117/12.847490
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2010, San Diego, California, United States

Abstract

Piezoelectricity is one major actuating mechanism of cellulose Electro-active paper (EAPap). In order to enhance piezoelectric performance of cellulose, thin piezoelectric sodium-potassium niobate, Na0.5K0.5NbO3(NKN), film on cellulose, silicon and glass substrates was deposited by magnetron sputtering method. As grown NKN layer on different substrates was characterized by XRD, AFM and electrical measurements. By increasing the RF power, crystal structures were observed from the NKN films on silicon and glass substrate, while no peak was observed from cellulose due to microcracks of films. The detail structural and electrical observation was discussed.

Citation Download Citation

Sang-Dong Jang, Jung-Hyuk Koh, Joo-Hyung Kim, and Jaehwan Kim "Investigation of sodium-potassium niobate (Na_0.5K_0.5NbO₃) thin film fabrication for piezoelectric sensor application", Proc. SPIE 7646, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2010, 76460E (30 March 2010); https://doi.org/10.1117/12.847490

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