31 March 2010 Micro-machinable polymer-derived ceramic sensors for high-temperature applications
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Micro-sensors are highly desired for on-line temperature/pressure monitoring in turbine engines to improve their efficiency and reduce pollution. The biggest challenge for developing this type of sensors is that the sensors have to sustain at extreme environments in turbine engine environments, such as high-temperatures (>800 °C), fluctuated pressure and oxidation/corrosion surroundings. In this paper, we describe a class of sensors made of polymer-derived ceramics (PDCs) for such applications. PDCs have the following advantages over conventional ceramics, making them particularly suitable for these applications: (i) micromachining capability, (ii) tunable electric properties, and (iii) hightemperature capability. Here, we will discuss the materials and their properties in terms of their applications for hightemperature micro-sensors, and microfabrication technologies. In addition, we will also discuss the design of a heat-flux sensor based on polymer-derived ceramics.
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Jian Liu, Jian Liu, Chengying Xu, Chengying Xu, Linan An, Linan An, } "Micro-machinable polymer-derived ceramic sensors for high-temperature applications", Proc. SPIE 7647, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010, 76470V (31 March 2010); doi: 10.1117/12.848529; https://doi.org/10.1117/12.848529

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