1 April 2010 Conductor width independence case of the self-resonance quality factor of semiadditive planar coils on a magnetoelastic substrate
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A magnetostrictive bending sensor with rectangular planar coil is investigated. Its purpose is to measure contactlessly mechanical quantities of non-vibrating structures using an alternating magnetic field. The coil turns are electrodeposited by pattern plating on top of a magnetostrictive Galfenol layer and a thin isolation layer. The coil turns investigated in this paper were manufactured with a constant height of 10 μm and gap of 20 μm but variable width. The sensor is operated near its electrical self-resonance between 5 and 40 MHz and requires a high quality factor. FEMsimulations show that the quality factor of circular planar coils is almost independent on the conductor width under the given design restrictions when skin and proximity effects are included. Analytical calculations of rectangular coil parameters with three different turn numbers and conductor widths depending on the turn number predict an almost constant self-resonance quality factor in the DC case. Measured self-resonance quality factors are up to 59 % lower. The main reason for the disagreement is the current crowding by the proximity effect since analytical calculation show a significant influence of the skin effect only at higher frequencies with respect to the investigated self-resonance frequencies. Compared to the results of an FEM analysis obtained for circular coils the proximity effect is much smaller as well as the achievable low frequency quality factor.
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U. Marschner, U. Marschner, A. Jahn, A. Jahn, E. Starke, E. Starke, N. Liu, N. Liu, U. Vogel, U. Vogel, C. Wenzel, C. Wenzel, U. Merkel, U. Merkel, A. B. Flatau, A. B. Flatau, W.-J. Fischer, W.-J. Fischer, } "Conductor width independence case of the self-resonance quality factor of semiadditive planar coils on a magnetoelastic substrate", Proc. SPIE 7647, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010, 76472R (1 April 2010); doi: 10.1117/12.847762; https://doi.org/10.1117/12.847762

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