Using orientation Zernike polynomials to predict the imaging performance of optical systems with birefringent and partly polarizing components

Johannes Ruoff; Michael Totzeck

doi:10.1117/12.871896

9 September 2010 Using orientation Zernike polynomials to predict the imaging performance of optical systems with birefringent and partly polarizing components

Johannes Ruoff, Michael Totzeck

Author Affiliations +

Proceedings Volume 7652, International Optical Design Conference 2010; 76521T (2010) https://doi.org/10.1117/12.871896
Event: International Optical Design Conference 2010, 2010, Jackson Hole, WY, United States

Abstract

Orientation Zernike Polynomials have been shown to provide a complete and systematic description of polarized imaging using the polar decomposition of the Jones pupil. We use this concept to predict the polarization performance of high NA lithography lenses.

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Johannes Ruoff and Michael Totzeck "Using orientation Zernike polynomials to predict the imaging performance of optical systems with birefringent and partly polarizing components", Proc. SPIE 7652, International Optical Design Conference 2010, 76521T (9 September 2010); https://doi.org/10.1117/12.871896

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