9 September 2010 Using orientation Zernike polynomials to predict the imaging performance of optical systems with birefringent and partly polarizing components
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Proceedings Volume 7652, International Optical Design Conference 2010; 76521T (2010) https://doi.org/10.1117/12.871896
Event: International Optical Design Conference 2010, 2010, Jackson Hole, WY, United States
Abstract
Orientation Zernike Polynomials have been shown to provide a complete and systematic description of polarized imaging using the polar decomposition of the Jones pupil. We use this concept to predict the polarization performance of high NA lithography lenses.
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Johannes Ruoff, Johannes Ruoff, Michael Totzeck, Michael Totzeck, } "Using orientation Zernike polynomials to predict the imaging performance of optical systems with birefringent and partly polarizing components", Proc. SPIE 7652, International Optical Design Conference 2010, 76521T (9 September 2010); doi: 10.1117/12.871896; https://doi.org/10.1117/12.871896
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