Research of active supporting technology based on 400mm thin mirror

Hong-zhuang Li; Xin-yue Liu; Jian-li Wang

doi:10.1117/12.865919

13 October 2010 Research of active supporting technology based on 400mm thin mirror

Hong-zhuang Li, Xin-yue Liu, Jian-li Wang

Proceedings Volume 7654, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes; 765404 (2010) https://doi.org/10.1117/12.865919
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Using a spherical mirror of 400mm diameter and 12mm thickness, active supporting technology of thin mirror is researched. The axial support of the mirror is composed of 12 active supports and 3 fixed supports. The force actuator, which is composed of displacement actuator and force sensor, is installed in the active support. The mirror surface is tested by Zygo interferometer. For calibration, each actuator exerts unit force alone, and the surface variation is tested and taken as the response function of the actuator. The response functions of all actuators compose the stiffness matrix. Then the stiffness matrix is used by damped least square method to determine the correction force of each active support. In order to analyze the correction capability of the active supports, 14 Zernike modes of the mirror surface are generated and tested respectively, and 7 modes are selected for correction. Initially, the RMS error of mirror surface is 1.16λ I(λ =0.6328nm)when all actuators exert the same force. After 5 iterations, the RMS error of mirror surface is reduced to 0.13λ, close to the original surface quality.

Citation Download Citation

Hong-zhuang Li, Xin-yue Liu, and Jian-li Wang "Research of active supporting technology based on 400mm thin mirror", Proc. SPIE 7654, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 765404 (13 October 2010); https://doi.org/10.1117/12.865919

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