6 October 2010 Simulation analysis and structure optimization of the polishing disc with the tiny-grinding wheel cluster based on MR effect
Author Affiliations +
Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76550W (2010) https://doi.org/10.1117/12.867524
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China
Abstract
A new planarization technique with an instantaneous tiny-grinding wheel cluster that is based on the magnetorheological (MR) effect is presented in this paper. The B-H curve of the MR polishing fluid is calculated, and the results show that the B-H curve is nearly linear and its relative magnetic permeability is about 2.63. Based on the above results, three designs of the polishing disc with the tiny-grinding wheel cluster are analyzed by using the electromagnetic field finite element simulation software. The simulation results show that the design where the magnetic poles are fixed alternately and contrarily to form a closed magnetic circuit has the optimum effect.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiabin Lu, Jiabin Lu, Qiusheng Yan, Qiusheng Yan, Aijun Tang, Aijun Tang, Weiqiang Gao, Weiqiang Gao, Lingye Kong, Lingye Kong, } "Simulation analysis and structure optimization of the polishing disc with the tiny-grinding wheel cluster based on MR effect", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76550W (6 October 2010); doi: 10.1117/12.867524; https://doi.org/10.1117/12.867524
PROCEEDINGS
6 PAGES


SHARE
Back to Top