6 October 2010 Error analysis of diffractive optical element manufactured by diamond turning technology
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Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 765525 (2010) https://doi.org/10.1117/12.867950
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China
Abstract
Both cost and performance are important factors used to evaluate the manufacture methods for diffractive optical element (DOE). The diamond turning technology has many advantages of processing diffractive optical element compared with other methods. There are special errors existing in this process which can decrease the performance and limit the application field of the DOE. In this paper, the errors caused by diamond turning technology are analyzed and the calculation results are given.
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Yun-Cui Zhang, Yun-Cui Zhang, Long Liu, Long Liu, Nian-Yu Zou, Nian-Yu Zou, Qing Liu, Qing Liu, } "Error analysis of diffractive optical element manufactured by diamond turning technology", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 765525 (6 October 2010); doi: 10.1117/12.867950; https://doi.org/10.1117/12.867950
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