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6 October 2010 Research of combination polishing technology
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Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76552R (2010) https://doi.org/10.1117/12.866698
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China
Abstract
Optical nano-surface is mainly processed by single method, which's high efficiency and high definition are in opposition to each other. The fused silica surface is manufactured with the combination of the Magnetorhelogical manufacturing technology and the Ballonet polishing technology. Finally the high-quality optical nano-surface is achieved which RMS of roughness value is 0.8nm and the sub-surface damage is less.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Liangxia Hang, Xueliang Zhu, Weiguo Liu, Zhongda Guo, Zhili Chen, and Hongjun Wang "Research of combination polishing technology", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76552R (6 October 2010); https://doi.org/10.1117/12.866698
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