11 October 2010 Study and considerations of nanometer and nano-radian surface profiler
Author Affiliations +
Abstract
A Nanometer and Nano-radian Surface Profiler (NSP) is under development at Brookhaven National Laboratory. Nanometer and nano-radian accuracy is required for newest state-of-the-art synchrotron radiation optics and highprecision optical measurement. This test accuracy must be maintained in larger angle test range. In order to reach this accuracy we have to remove all error sources as much as possible or to reduce them to nano-radian level. We present the approaches in optimized optical system designing, scanning optical head mode selection, non-tilted reference method, quality control of optical components, and temperature stabilization. Some considerations and preliminary measurements are presented.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shinan Qian, Kun Qian, "Study and considerations of nanometer and nano-radian surface profiler", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560D (11 October 2010); doi: 10.1117/12.871258; https://doi.org/10.1117/12.871258
PROCEEDINGS
10 PAGES


SHARE
Back to Top