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11 October 2010Design of large-size aspheric measurement system and motion accuracy analysis
A large-size four -axis aspheric measurement system is constructed in the paper. In the system, XYZ axes are driven by
linear motors and the rotation axis is based on angular encoder. In order to establish the model of motion error, the
motion error of each axis is analyzed. Then by comparing the results of first-order linear compensation and six-order
compensation with least square fit, employ the first-order linear compensation as motion accuracy compensation.
Finally, apply the measurement system to the symmetric aspheric measuring experiment. Fit the measured data of
aspherical surface and obtain the fitting deviation. The experiment results show that this measurement system can meet
the accuracy requirement of measuring large-size aspheric surface.
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Yonglu Zhu, Yinbiao Guo, Wei Luo, Lushuang Chen, "Design of large-size aspheric measurement system and motion accuracy analysis," Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 765620 (11 October 2010);