11 October 2010 Fabrication 3D buried channel optical waveguide modulators on field-driven ion exchange process
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Abstract
A high electric field technique was developed to fabricate buried optical waveguide modulator on K9 optical glass. The 80V voltage was applied on the glass to accelerate the field-driven ion exchange process by expeditiously replacing host sodium ions in the glass with silver ions. As a result, the optical loss for optical waveguide modulator was measured using the edge coupling technique with a 0.6328μm He-Ne laser. Loss of 0.20 dB/cm was obtained for channel waveguides of 25μm in depth, relatively low for waveguides of such depth at red wavelength.
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Zigang Zhou, Zigang Zhou, Wenqiang Chen, Wenqiang Chen, Li Zhu, Li Zhu, Jing Li, Jing Li, Xiaoying Luo, Xiaoying Luo, } "Fabrication 3D buried channel optical waveguide modulators on field-driven ion exchange process", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 765621 (11 October 2010); doi: 10.1117/12.863592; https://doi.org/10.1117/12.863592
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