Self-mixing interferometry based on quadrature demodulation technique for displacement measurement

Dongmei Guo; Hui Hao; Daofu Han

doi:10.1117/12.864103

11 October 2010 Self-mixing interferometry based on quadrature demodulation technique for displacement measurement

Dongmei Guo, Hui Hao, Daofu Han

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76562Q (2010) https://doi.org/10.1117/12.864103
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

A new, to the best of our knowledge, method for the measurement of the micro-displacement of a remote target based on the laser diode self-mixing interferometry(LDSMI) is presented. Quadrature demodulation technique is introduced to improve the measurement accuracy. Phase modulation of the laser beam is obtained by an electro-optic modulator (EOM) in the external cavity. Detection of the target's displacement can be easily achieved by sampling the interference signal at those times which satisfied certain conditions. The major advantage of the technique is that it does not involve any complicated calculation and insensitive to the sampling error. Experimental results show that the proposed method can effectively improve the displacement measurement accuracy of the LDSMI system to a few nanometers.

Citation Download Citation

Dongmei Guo, Hui Hao, and Daofu Han "Self-mixing interferometry based on quadrature demodulation technique for displacement measurement", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76562Q (11 October 2010); https://doi.org/10.1117/12.864103

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KEYWORDS

Demodulation

Modulation

Interferometry

Semiconductor lasers

Phase modulation

Ferroelectric materials

Interferometers

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