Vertical scanning white light interfering profilometer based on Linnik interference microscope

Shuzhen Wang; Tiebang Xie; Suping Chang

doi:10.1117/12.864844

11 October 2010 Vertical scanning white light interfering profilometer based on Linnik interference microscope

Shuzhen Wang, Tiebang Xie, Suping Chang

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76563I (2010) https://doi.org/10.1117/12.864844
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

In this paper we provide a vertical scanning white light interfering profilometer based on Linnik type interference microscope. A vertical scanning system with coarse-fine dual-stage actuators is developed, in which the coarse positioning is performed by inclined sliding guides, AC servo motor, ballscrew and the fine positioning is performed by parallel board flexure hinge and piezoelectric ceramic, respectively. The displacement range of the vertical scanning system is 0~2mm and 0.4nm theoretical motion resolution can be achieved. The whole interference microscope of the profilometer is driven by the vertical scanning system, which will eliminate the movement coupling error of vertical direction caused by horizontal movement of 2D precision stage. The interference fringes or the focal plane can be automatically located by moving the vertical scanning system. To eliminate the measurement errors of the profilometer caused by incorrect positioning of the vertical scanning system, its displacement is measured in real-time by a laser interferometer with theoretical resolution of 0.01nm. A single groove specimen with the depth of 1.26μm calibrated by National Institute of Metrology P.R.China, MEMS device and textured steel sheet was measured to illustrate the capabilities of the profilometer.

Citation Download Citation

Shuzhen Wang, Tiebang Xie, and Suping Chang "Vertical scanning white light interfering profilometer based on Linnik interference microscope", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76563I (11 October 2010); https://doi.org/10.1117/12.864844

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