Analysis and test of a piezoelectric deformable mirror

Dan Wang; Chaoming Li; Jianhong Wu

doi:10.1117/12.865687

11 October 2010 Analysis and test of a piezoelectric deformable mirror

Dan Wang, Chaoming Li, Jianhong Wu

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76563K (2010) https://doi.org/10.1117/12.865687
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Adaptive optics is concerned with correcting a distorted wavefront by introducing a counter aberration into an element of the optical system, it use widely in astronomy and there are also applications in microscopy, the writing of 3D optical bit memory and photo-fabrication now. As an active correction element in adaptive optics, a deformable mirror can be used to modify the phase of the beam actively. In this paper, the active wave front correction method of adaptive optics system is studied, types and characteristics of the actuators of deformable mirror are analyzed, and mainly introduces piezoelectric deformable mirror. According to the conclusion of theoretical analysis, if the material is selected, diameter and thickness of the deformable mirror are given, the displacement of the deformable mirror is directly proportional to the initial loads. A deformable mirror has been manufactured with silica. The silica plate is 100mm in diameter and 10mm in thick. 37-electrode piezoelectric actuators are selected to correct low-order aberrations. Based on the ANSYS software, the finite element analysis model of deformable mirror is calculated. The influence of the major structural parameters is discussed. The calculated result and the conclusion of theoretical analysis are compared. Results show that, the endless improvement of finite element model is necessary and feasible. The value of optimization design and the conclusion of theoretical analysis are consistent with each other. The research we do lay the foundation for the further study with more actuators and correcting high-frequency aberration.

Citation Download Citation

Dan Wang, Chaoming Li, and Jianhong Wu "Analysis and test of a piezoelectric deformable mirror", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76563K (11 October 2010); https://doi.org/10.1117/12.865687

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Deformable mirrors

Actuators

Chemical elements

Finite element methods

Adaptive optics

Mirrors

Wavefronts

Show All Keywords

Keywords/Phrases

Search In:

Publication Years