12 October 2010 Testing aspheric surface with annular subaperture stitching method based on Hartmann Shack sensor
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Abstract
Annular subaperture stitching method based on Hartmann Shack sensor for testing aspheric surface is developed in this paper. The basic principle of the method is described. The modal wavefront reconstruction algorithm with annular Zernike polynomials is established to get the subaperture wavefront. The stitching algorithm based on annular Zernike polynomials is employed to get the whole-aperture wavefront. An ellipsoidal surface tested by this method. The linked surface profile is coinciding with the whole-aperture surface profile directly tested by Zygo Interferometer, and the peakvalley value and root mean square value of the residual wavefront between the two above wavefronts are 0.096 waves and 0.019 waves.
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Hongyan Xu, Hao Xian, Yudong Zhang, "Testing aspheric surface with annular subaperture stitching method based on Hartmann Shack sensor", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76564Y (12 October 2010); doi: 10.1117/12.867708; https://doi.org/10.1117/12.867708
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