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12 October 2010 Measurement and analysis of surface profiles by inverse scattering method
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Abstract
Evaluation and measurement of surface profiles are very important especially to short wavelength optical research. A linear system treatment of short-wavelength surface scattering theory is introduced, and based on this, a new inverse scattering mathematical model of soft X-ray grazing incidence optics is established. By using these scattered light distributions of super-smooth surfaces measured by a soft X-ray reflectometer, the surface profiles of super-smooth surfaces are computed by means of inverse scattering mathematical model of soft X-ray grazing incidence optics. The calculating results are in accordance with those measured by WYKO. It can be concluded that the soft X-ray grazing incidence optical scattering method can calculate micro-roughness and surface auto correlation function of smooth surface accurately, and can give optical surface profiles intuitively.
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Shu-yan Chen and Xin-jun Xu "Measurement and analysis of surface profiles by inverse scattering method", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76565J (12 October 2010); https://doi.org/10.1117/12.865564
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