Establishment and study on dihedral angle detection model of retro-reflector based on Zygo interferometer

Xu Feng; Wei Zhong; Guo-hui Wu; Hui Zhou

doi:10.1117/12.864162

11 October 2010 Establishment and study on dihedral angle detection model of retro-reflector based on Zygo interferometer

Xu Feng, Wei Zhong, Guo-hui Wu, Hui Zhou

Author Affiliations +

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76566V (2010) https://doi.org/10.1117/12.864162
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The dihedral angle of a retroreflector, which directly determines the quality of velocity aberration compensation, is usually detected using a Zygo interferometer. However, since the software is effectively a black box, the user is unable to determine the method and approach that is used to process the data. This also adds further difficulty of determining the error inherent in the retroreflector. From the perspective of phase distribution, a mathematical model is built between rectangular error and phase distribution. Combining the original data and area boundaries provided by Zygo interferometer, and a numerical fitting method, the dihedral angle value of the retroreflector is computed, and then compared with the value provided by the interferometer. Results show that the maximum difference between the two values is 0.2". Considering that the measurement tolerance of the Zygo interferometer is 0.2", this suggests that the computed value is consistent with the value given by the interferometer. Thus, computing method provides a new basis and approach for dihedral angle detection for retroreflector manufacturers and users.

Citation Download Citation

Xu Feng, Wei Zhong, Guo-hui Wu, and Hui Zhou "Establishment and study on dihedral angle detection model of retro-reflector based on Zygo interferometer", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76566V (11 October 2010); https://doi.org/10.1117/12.864162

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KEYWORDS

Retroreflectors

Interferometers

Data processing

Data acquisition

Optical testing

Phase shifts

Manufacturing

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