11 October 2010 A circular micro-grating array for Shack Hartmann wavefront sensors
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A novel micro-grating array for Shack Hartmann wavefront sensors is presented. This circular micro-grating array shows obvious advantage in matching circular aperture. It also provides a potential way of decreasing the expense of Shack Hartmann wavefront sensors for its easy design and manufacturing procedure. An implementation is shown together with experimental and measuring results. With this circular micro-grating array, a circular aperture can be matched by 100%, which can avoid the lost of useful information when testing and measuring, at the same time, the regular focal spots array will adapt to the common detectors which are always rectangular. In addition, another design and implementation of one dimensional micro-grating array is also presented by which a higher efficiency will be available.
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Haiying Wang, Haiying Wang, Ling Wei, Ling Wei, Jie Chen, Jie Chen, } "A circular micro-grating array for Shack Hartmann wavefront sensors", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76567I (11 October 2010); doi: 10.1117/12.867501; https://doi.org/10.1117/12.867501

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