22 October 2010 Analysis of silicon-based optical racetrack resonator for acceleration sensing
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Proceedings Volume 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 765704 (2010); doi: 10.1117/12.866030
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China
Abstract
Silicon based racetrack resonator are demonstrated as highly sensitive acceleration sensor. The sensor consists of a straight waveguide coupled with a racetrack resonator, and a crossbeam seismic mass serving as the vibration unit. The resonant wavelength, which depends on the optical phase change per round trip, is sensitive to external accelerations due to the waveguide increment and stress-optic effect. With a 30-dB signal-to-noise ratio measurement system, the detection limit and dynamic range are theoretically obtained as high as 4.8×10-4 g under the frequency of acceleration below 200 Hz. The new silicon-based accelerometer will have great potential in seismic prospecting due to its high sensitivity, light weight and immunity to electromagnetic interference.
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Wenqin Mo, Huaming Wu, Dingshan Gao, Zhiping Zhou, "Analysis of silicon-based optical racetrack resonator for acceleration sensing", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 765704 (22 October 2010); doi: 10.1117/12.866030; https://doi.org/10.1117/12.866030
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KEYWORDS
Waveguides

Resonators

Silicon

Sensors

Signal attenuation

Phase shifts

Signal to noise ratio

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