Fast, high efficiency and cost-effective laser nano-lithography

C. S. Peng; C. Tan

doi:10.1117/12.867965

22 October 2010 Fast, high efficiency and cost-effective laser nano-lithography

C. S. Peng, C. Tan

Proceedings Volume 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 765708 (2010) https://doi.org/10.1117/12.867965
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The main advantageous features of laser interference lithography (LIL) technology in fabrication of nano structures and devices are high resolution, low cost and high efficiency. By using LIL, the graded-index patterns consist of periodic modified lines (MLs) on the periodic square patterns. Patterns with MLs formed on SiO₂ deposited on GaAs substrate. The orientation and periodicity of MLs are shown to depend on the configuration of the incident laser beams. Periodic arrays of holes in GaAs, covered with SiO₂ bubbles, were directly written into the sample within only some minutes. The diameters of the smallest holes were less than 30 nm. The smallest modification features of the GaAs were less than 5 nm. Four-beam LIL was shown to be a good technology to generate graded-index photonic crystals with square lattice. High intensity enhancement and sub-wavelength focusing were achieved simultaneously. The results indicate a new lowcost and high-efficiency way of fabricating planar lens.

Citation Download Citation

C. S. Peng and C. Tan "Fast, high efficiency and cost-effective laser nano-lithography", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 765708 (22 October 2010); https://doi.org/10.1117/12.867965

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available