22 October 2010 Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applications
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Abstract
In this paper, we present a novel method for the fabrication of high density pattern in PET foils employing nanoimprint lithorgraphy. The temperature and pressure dependence on the imprinted pattern were investigated. Well resolved PET nanopatterns (sub-100nm resolution) were transferred successfully. It is observed that the grating with different trench depths will demonstrates corresponding changes of diffraction intensity distribution. The grating imprinted in PET foils could broader applications in the manufacture of nanophotonic structures owing to its excellent flexibility and transparency. Based on the optimized imprint process, a novel method for the fabrication of phase gratings and nanochannels is presented. This developed process can find broader applications in the manufacture of nanofluidic channels and other nanophotonic structures.
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Xudi Wang, Xudi Wang, Jian Jin, Jian Jin, Qisheng Tang, Qisheng Tang, Wenrui Tian, Wenrui Tian, Xiaojun Li, Xiaojun Li, Shaojun Fu, Shaojun Fu, Yanlin Liao, Yanlin Liao, } "Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applications", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 765710 (22 October 2010); doi: 10.1117/12.866228; https://doi.org/10.1117/12.866228
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